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Principle and observation of fluorescence moir¨¦ fringes for alignment in print and imprint methods
TIME:2017-9-30 9:38:00

The authors report the principle and experimental observation of fluorescence moir¨¦ interference fringes for alignment in the print and imprint methods. Concave bar and cross alignment marks on a silica mold and substrate without the deposition of any light-shielding or high-refractive-index layers could be visualized by fluorescence microscopy with a fluorescent liquid sandwiched between the patterned surfaces. Fluorescence moir¨¦ interference fringes with a pitch of 44 ¦̀m were generated by the superimposition of two sets of mold bar arrays with respective pitches of p1 = 4.0 ¦̀m and p2 = 4.4 ¦̀m on substrate bar arrays with different periodicity of p2 and p1 through a thin fluorescent liquid layer. The fluorescence moir¨¦ fringes were attributed to an additive-type generation by the interference of two luminous gratings with different periodicities, which was different from a multiplicative-type generation by the superimposition of two light-shielding metal gratings with different periodicities under illumination. Coarse alignment with 2-¦̀m-wide cross marks was performed by manually operating the substrate-side stages, and the misalignment was evaluated with the two sets of fluorescence moir¨¦ fringes. The alignment method by fluorescence microscopy with a fluorescent liquid provided the possibilities of not only fine alignment with fluorescence moir¨¦ fringes but also in situ monitoring of the residual layer thickness formed between the mold and substrate surfaces before curing for ultraviolet nanoimprinting.

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